Einsatz von Mikroplasmen für die Herstellung von Silizium‐Mehrlagenaufbauten |
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| Authors: | Marko Eichler Dipl.‐Phys. Benedikt Michel Dipl.‐Ing. Markus Gabriel Dipl.‐Ing. Claus‐Peter Klages Prof. Dr. |
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| Affiliation: | 1. Fraunhofer‐Institut für Schicht‐und Oberfl?chentechnik IST, Bienroder Weg 54 E, 38108 Braunschweig, Telefon: +49 (0) 531 / 2155 ‐636, Fax: ‐900, Internet: www.ist.fraunhofer.de;2. Technische Universit?t Braunschweig, Institut für Oberfl?chentechnik, Bienroder Weg 53, 38108 Braunschweig, Telefon: +49 (0) 531 / 2155 ‐643, Fax: ‐900, Internet: http://www.tu‐braunschweig.de/iot;3. SUSS MicroTec Lithography GmbH, Schleissheimer Str. 90, 85748 Garching, Tel.: +49 (89) 32007‐339, Fax: +49 (89) 32007‐162,Internet: www.suss.com;4. Fraunhofer‐Institut für Schicht‐ und Oberfl?chentechnik IST, Bienroder Weg 54 E, 38108 Braunschweig, Telefon: +49 (0) 531 / 2155 ‐510, Fax: ‐901, Internet: www.ist.fraunhofer.de |
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| Abstract: | Micro Plasma Processes for MEMS Packaging The encapsulation of MEMS devices can be difficult, since released micromechanical parts (e.g. membranes, valves, and cantilevers) tend to stick to the surrounding surfaces. Area‐selective surface modification is a new approach, developed by the Fraunhofer‐Institute for Surface Engineering and Thin Films (IST), to overcome these problems. From a more general point of view, area‐selective surface tailoring with microplasmas is an attractive topic for micro systems production. The business transfer of the technique by implementation into the SU SS mask is currently being evaluated. |
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