| 基于激光直写的柔性天线传感器研究 |
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| 引用本文： | 张嘉琪,高阳,李淳,鞠宽,谈建平,丁琰妍,轩福贞.基于激光直写的柔性天线传感器研究[J].光电工程,2022,49(1):60-70. |
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| 作者姓名： | 张嘉琪 高阳 李淳 鞠宽 谈建平 丁琰妍 轩福贞 |
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| 作者单位： | 华东理工大学机械与动力工程学院,上海 200237,华东理工大学机械与动力工程学院,上海 200237;武汉光电国家研究中心,湖北 武汉 430074,香港科技大学土木与环境工程系,中国 香港 999077 |
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| 基金项目： | 国家重点研发计划项目(2020YFB2008500);国家自然科学基金资助项目(51705154,51835003,61804054);武汉光电国家实验室开放项目(2020WNLOKF007)。 |
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| 摘 要： | 激光直写是一种高效、可规模化制备柔性电子器件的技术。本文采用激光直写技术在具有良好介电性能的聚酰亚胺薄膜上制备了一种可用于应变传感和湿度传感的柔性环形天线传感器。利用激光碳化聚酰亚胺获得的材料表面呈现多孔及堆叠片层碳结构,当施加于天线上的应变和环境湿度改变时,天线的谐振频率会发生规律变化,进而实现应变和湿度感知。制备的环形天线传感器的应变响应灵敏度为?8.943 kHz/με,湿度响应灵敏度为?6.45 MHz/RH%。采用激光直写技术制备的天线传感器可以广泛应用于结构健康监测等领域。
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| 关 键 词： | 激光直写 天线传感器 应变传感 湿度传感 |
Laser direct writing of flexible antenna sensor for strain and humidity sensing |
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| Zhang Jiaqi,Gao Yang,Li Chun,Ju Kuan,Tan Jianping,Ding Yanyan,Xuan Fuzhen.Laser direct writing of flexible antenna sensor for strain and humidity sensing[J].Opto-Electronic Engineering,2022,49(1):60-70. |
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| Authors: | Zhang Jiaqi Gao Yang Li Chun Ju Kuan Tan Jianping Ding Yanyan Xuan Fuzhen |
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| Affiliation: | (School of Mechanical and Power Engineering,East China University of Science and Technology,Shanghai 200237,China;Wuhan National Laboratory for Optoelectronics,Huazhong University of Science&Technology,Wuhan,Hubei 430074,China;Dept.of Civil and Environmental Engineering,Hong Kong University of Science&Technology,Hong Kong 999077,China) |
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| Abstract: | Laser direct writing(LDW)is a highly efficient and scalable technology to fabricate flexible electronic devices.In this work,a type of flexible circle antenna sensor is developed by LDW on polyimide film with good dielectric property in response to strain and humidity.The carbonized polyimide has good conductivity and great adhesion to the substrate,which could be used as the active material for antenna.The carbonized polyimide presents porous stacked carbon structures and has the excellent electrical properties,which facilitate strain sensing and make the antenna have low loss,respectively.The resonance frequency of the LDW-generated antenna sensor changes with the variation of applied strain and environmental humidity.The sensitivities of LDW-generated antenna sensor response to applied strain and humidity are?8.943 kHz/μεand?6.45 MHz/RH%,respectively.The flexible antenna sensor prepared by the LDW provides a new possibility for the application of structural health monitoring. |
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| Keywords: | laser direct writing antenna sensors strain sensing humidity sensing |
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