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Structure and Magnetic Properties of Fe-N Films Prepared by Dual Ion Beam Sputtering |
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| Abstract: | Fe-N films were prepared on Si substrate by dual ion beam sputtering (DIBS). It is of the films were investigated by a vibrating sample magnetometer (VSM). The structure of the films is insensitive to the ratios of N2/Ar in main ion source(MIS), and is mainly influenced by the substrate temperature (Ts).`` |
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