| 胛⑾讣际踅逃恐氐闶笛槭?上海交通大学 |
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| 引用本文： | 微纳科学技术.胛⑾讣际踅逃恐氐闶笛槭?上海交通大学[J].岩土工程学报,2006(Z1). |
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| 作者姓名： | 微纳科学技术 |
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| 作者单位： | 研究院微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实 |
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| 摘 要： | 200030,上海200030磁悬浮;;微陀螺;;电容检测为了实现磁悬浮转子微陀螺的电容检测,使用数值积分方法计算了新型磁悬浮转子微陀螺的电容值与转子倾斜角度的关系。计算确定了电容极板尺寸,电容的连接采用了差动电容的连接方式。通过电容检测电路,检测到了小角度输入范围内的陀螺输出信号。检测结果表明:该电容结构对于静态角度输入具有较好的线性响应,该微陀螺原形的电容结构能够检测到的转子倾斜角度可达到0.1°,对应的电容变化约为1 000 aF,满足了微陀螺对电容检测的要求。Design of capacitance structure of micro gyroscope with electromagnetically levitated rotorHUANG Xiao-gang,LIU Wu,SHAO Shi-yi,CHEN Wen-yuan,ZHANG Wei
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| 关 键 词： | 验室 上海200030 上海200030 上海200030 上海 |
-ping(Key Lab of Thin Film and Micro Fabrication Technology,Key Lab of State Defense Micro-Nan |
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| o Fabrication,Research Institute of Micro-Nano Technology,Shanghai Jiaotong University,S.-ping(Key Lab of Thin Film and Micro Fabrication Technology,Key Lab of State Defense Micro-Nan[J].Chinese Journal of Geotechnical Engineering,2006(Z1). |
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| Authors: | o Fabrication Research Institute of Micro-Nano Technology Shanghai Jiaotong University S |
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| Abstract: | |
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| Keywords: | urbance signals in long distances is proposed A feedback loop is constructed within all-fiber |
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