9Cr18轴承钢表面不同等离子体浸没离子注入强化处理技术研究

采用不同的等离子体浸没离子注入(PⅢ)工艺在9Cr18轴承钢表面进行了气体、金属、金属加气体的离子注入和碳化钛(TiC)、类金刚石(DLC)薄膜的等离子体浸没离子注入与沉积(PⅢD).对处理后的试样进行了X射线光电子能谱(XPS)、X射线衍射(XRD)、俄歇电子能谱(AES)和拉曼光谱(Raman)分析;测试了处理前后试样的显微硬度、磨痕宽度和摩擦系数.结果表明:处理后试样表面均形成了不同的改性层,且改性层中化学组成和各元素的浓度-深度分布随处理工艺的不同而变化;处理后试样的显微硬度都有较大提高,最大增幅达77.7%;表面摩擦系数由0.8下降到0.16;磨痕宽度减少了23倍;与PⅢ工艺相比,相同参数下,PⅢD处理后的试样表面综合性能更加优异.

Enhancement on the Surface Properties of 9Cr18 Bearing Steel by Different Plasma Source Immersion Ion Implantation Processes

Metal ion implantation, nitrogen ion implantation, metal ion plus nitrogen ion co-implantation are used to improve the working surface of 9Cr18 bearing steel by various plasma immersion ion implantation (PIII) processes. Titanium carbide and diamond-like carbon thin films are synthesized by plasma immersion ion implantation and deposition (PIIID) technique. The chemical composition and various elements depth profiles of treated samples were characterized by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), Auger electron spectroscopy (AES) and Raman spectroscopy, respectively. The microhardness, friction and wear behavior were also evaluated. The results reveal that modified layer are produced on the surface, and the surface properties vary with the various plasma source parameters. The maximum microhardness is increased by 77.7%, the friction coefficient is decreased from 0.8 to 0.15, and the wear track width is reduced by 23 times. Comparison with the comprehensive properties of different PIII process, PIIID technique is more better than PIII process under the same conditions.