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Structural properties of alloyed Ti/Al/Ti/Au and Ti/Al/Mo/Au ohmic contacts to AlGaN/GaN
Affiliation:1. Semiconductor Technology Laboratory, GE Global Research, Niskayuna, NY 12309, United States;2. Microstructural and Surface Analysis Laboratory, GE Global Research, Niskayuna, NY 12309, United States;3. Lockheed Martin MS2-Radar Systems, Syracuse, NY 13221, United States;1. Key Lab of Wide Band Gap Semiconductor Materials and Devices, Xi''an 710071, China;2. The School of Microelectronics, Xidian University, Xi''an 710071, China;1. Department of Electrical and Electronics Communication Engineering, GITAM School of Technology, GITAM University, Bengaluru, India;2. Department of Electronics and Communication Engineering, Karunya Institute of Technology and Sciences, Coimbatore, India;3. Department of Electronics and Communication Engineering, Amal Jyothi College of Engineering, Kerala, India;4. Graduate Degree Program of College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan;5. International College of Semiconductor Technology, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan;6. Taiwan Semiconductor Research Institute (TSRI), Hsinchu, Taiwan;7. Department of Electrical Engineering, University of Sharjah, Sharjah, United Arab Emirates;1. SR University, Warangal, Telangana, India;2. Karunya Institute of Technology and Sciences, Coimbatore, Tamilnadu, India;3. Sona College of Technology, Salem, Tamilnadu, India
Abstract:Two alloyed ohmic contact structures for AlGaN/GaN–Ti/Al/Ti/Au and Ti/Al/Mo/Au were studied. Both structures were optimized for minimum ohmic contact resistance. Structures grown on sapphire and SiC substrates were used to investigate structural properties of ohmic contacts to AlGaN/GaN. Ohmic contacts to AlGaN/GaN on SiC showed higher contact resistance values compared to contacts to AlGaN/GaN on sapphire. Ohmic contact metals were etched on samples after annealing. The alloyed interface was studied with backside illumination under an optical microscope. Alloyed inclusions associated with threading dislocations were observed on the surface. For the AlGaN/GaN on SiC sample the inclusion density was an order of magnitude lower than for the sample on sapphire. Conductive atomic force microscopy with carbon nanotube tip was used to investigate topography and conductivity profile of the surface after ohmic contact metal removal by etching.
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