ZnO transparent thin films for gas sensor applications |
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| Affiliation: | 1. Institute of Electronic Structure and Laser, Foundation for Research and Technology Hellas, PO Box 1527, Vasilika Vouton, 71110 Heraklion, Crete, Greece;2. Physics Department, University of Crete, 71110 Heraklion, Crete, Greece;3. Center of Materials Technology and Laser, Science Department, School of Applied Technology, Technological Educational Institute of Crete, Heraklion, Estavromenos, 71004 Heraklion, Crete, Greece;1. Laboratory of Physics of Materials and Nanomaterials Applied at Environment, Faculty of Sciences of Gabes, 6072 Gabes, Tunisia;2. Al Imam Mohammad Ibn Saud Islamic University (IMSIU), College of Sciences, Department of Physics, Riyadh 11623, Saudi Arabia;3. Department of Electronic Engineering, Chemistry and Materials Engineering, University of Messina, Messina 98166, Italy;4. Department of Heritage, Architecture and Urban Planning, “Mediterranea” University of Reggio Calabria, 89124 Reggio Calabria, Italy;1. Department of Physics, Faculty of Science, Kasetsart University, Bangkok, 10900, Thailand;2. Department of Physics, Faculty of Science, Burapha University, Chonburi, 20131, Thailand;3. Department of Mathematics, Faculty of Science, King Mongkut’s University of Technology Thonburi, Bangkok, 10140, Thailand;1. Key Laboratory of Applied Surface and Colloid Chemistry, National Ministry of Education, Institute for Advanced Energy Materials, School of Materials Science & Engineering, Shaanxi Normal University, Xi''an 710062, China;2. School of Science, Xi''an Technological University, Xi''an 710032, China;3. Dalian Institute of Chemical Physics, National Laboratory for Clean Energy, Chinese Academy of Sciences, Dalian, 116023, China;4. Xinjiang University, China;1. Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu, Shizuoka, 432-8011, Japan;2. Center for Materials Science and Nano Devices, Department of Nanotechnology, SRM University, Kattankulathur, Kancheepuram, 603203, Tamil Nadu, India;3. Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu, Shizuoka, 432-8011, Japan;4. Thin Film Materials Laboratory, Department of Physics, Shivaji University, Kolhapur, India;5. Department of Materials Science and Engineering, Nagoya Institute of Technology, Gokiso-ku, Showa-ku, Nagoya, 466-8555, Japan;1. MTA-BME Technical Analytical Chemistry Research Group, Szent Gellért tér 4, Budapest, H-1111, Hungary;2. Georgi Nadjakov Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee Blvd., 1784 Sofia, Bulgaria;3. Department of Microelectronics, Technical University of Sofia, 8 Kliment Ohridski Blvd., 1756 Sofia, Bulgaria;4. Budapest University of Technology and Economics, Department of Inorganic and Analytical Chemistry, Szent Gellért tér 4, Budapest, H-1111, Hungary |
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| Abstract: | Zinc oxide (ZnO) transparent thin films were deposited onto silicon and Corning glass substrates by dc magnetron sputtering using metallic and ceramic targets. Surface investigations carried out by Atomic Force Microscopy (AFM) and X-ray Diffraction (XRD) have shown a strong influence of deposition technique parameters on film surface topography. Film roughness (RMS), grain shape and dimensions are correlated with the deposition technique parameters as well as with the target material. XRD measurements have proven that the dc sputtered films are polycrystalline with the (002) as preferential crystallographic orientation. AFM analysis of thin films sputtered from a ceramic target has shown a completely different surface behavior compared with that of the films grown from a metallic target. This work demonstrates that the target material and the growth conditions determine the film surface characteristics. The gas sensing characteristics of these films are strongly influenced by surface morphology. Thus correlating the optical and electrical film properties with surface parameters (i.e. RMS and Grain Radius) can lead to an enhancement of the material's potential for gas sensing applications. |
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