| 溶胶一凝胶工艺对PZT铁电薄膜结构的影响 |
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| 引用本文： | 何恩培,刘梅冬,卢春如. 溶胶一凝胶工艺对PZT铁电薄膜结构的影响[J]. 压电与声光, 1994, 0(5) |
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| 作者姓名： | 何恩培 刘梅冬 卢春如 |
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| 作者单位： | 华中理工大学固体电子学系 |
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| 摘 要： | 本文阐述了用溶胶一凝胶法制备锆钛酸铅（ＰＺＴ）铁电薄膜的工艺参数对薄膜结构的影响。实验表明，采用合适的工艺参数能制备出具有钙钛矿型结构的ＰＺＴ铁电薄膜。
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| 关 键 词： | 溶胶一凝胶工艺，铁电薄膜，锆钛酸铅 |
Influence of Sol-Gel Process on Structure of PZT Ferroelectric Thin Film |
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| He Enpei,Liu Meidong,Lu Cunru. Influence of Sol-Gel Process on Structure of PZT Ferroelectric Thin Film[J]. Piezoelectrics & Acoustooptics, 1994, 0(5) |
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| Authors: | He Enpei Liu Meidong Lu Cunru |
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| Abstract: | This paper formulated the influence of Sol-Gel process parameters on structure of PZT ferroelectric thin film.The experiments show that the PZT ferroelectric thin film with pe-roskite structure can be produced using reasonable process parameters. |
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| Keywords: | sol-Gel process ferroelectric thin film PZT |
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