新型阴极粘贴技术制备三极CNT-FED的研究

利用催化剂高温分解在硅衬底上生长了碳纳米管薄膜阴极；采用丝网印刷工艺、高温烧结工艺以及低熔点玻璃封接技术，制作了三极结构的碳纳米管场致发射显示器器件．采用了新型的阴极粘贴技术来装配碳纳米管阴极。解决了硅片和封装玻璃之间热膨胀系数不一致的技术难题，实现了稳定可靠的整体器件高温封装，同时也避免了其他器件制作工艺对碳纳米管阴极的损伤，增强了阴极装配技术的适用性和灵活性．整体显示器具有良好的场致发射特性以及比较高的显示亮度．

The fabrication of the triode CNT-FED with new cathode-pasting technology

The carbon nanotube film cathode is prepared on the silicon substrate by the catalyst-pyrolysis process. The triode CNT-FED device sample is fabricated by the simple screen-printing process, high temperature sintering process and low-melting-point-glass sealing-in technology. The carbon nanotube cathode is assembled by new cathode-pasting technology, so the difficulty of the existence of the difference in thermal expansion coefficients between the silicon substrate and the packaging glass is settled, and the contamination of the carbon nanotube cathode is avoided. The stable and reliable whole device packaging is confirmed by new cathode-pasting technology, and the applicability and flexibility of the cathode-assembly-method are obviously improved. The whole FED possesses better filed emission characteristics and higher vision brightness.