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Surface Roughness Measurement by Scanning Electron Microscope |
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| Authors: | Hisayoshi SATO Masanori O-Hori Kazuo Nakayama |
| Abstract: | |
| Keywords: | SEM scanning electron microscope 2D two dimension/-sional 3D three dimension/-sional BEI backscattered electron image BES backscattered electron signal SEI secondary electron signal CRT cathode ray tube IC integrated circuit. |
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