球面拼接的相对曲率半径测量

拼接镜面加工制造的最大难题是匹配各子镜，即使各子镜的曲率半径完全匹配，使其能够等效成一个单一的主镜，对于球面拼接镜，就是要求各子镜的曲率半径相同。本文提出了一种使用Shack-Hartmann传感器和高精度球径仪对球面子镜的相对曲率半径进行测量的新方法，并建立了一个实验系统。该方法先使用共焦调整方法使各子镜共焦，然后再用S-H传感器测量子镜的轴向离焦量，轴向调整压电陶瓷促动器，使由传感器测得的离焦量接近于0，最后对子镜进行一次共焦调整之后，就可以使用高精度球径仪测量出各子镜之间的相对曲率半径差。实验中，拼接镜由三块对边长300mm的正六边形子镜组成，子镜面形为球面，设计曲率半径为2000mm。分析及实验表明，该方法测得的球面拼接子镜的相对曲率半径差精度约为 ，方法适用于大型球面拼接镜面望远镜各子镜相对曲率半径的检测。

A novel relative radius of curvature metrology for spherical segmented mirrors

With the aim to measure the relative curvature radius between the two segments in spherical segmented mirrors and to improve the matching accuracy of segments,a new method utilizing a Shack-Hartmann sensor and a high precision spherometer to measure the relative radius of each spherical segment is presented and an experiment system is also setup.The method firstly uses a co-focus technique to co-focus each segment;then uses the S-H sensor to measure the defocus in the optical axis direction and employs a PZ...