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CMOS反相器高功率微波脉宽扰乱效应的建模和分析
引用本文:于新海,柴常春,乔丽萍,杨银堂,刘阳,席晓文. CMOS反相器高功率微波脉宽扰乱效应的建模和分析[J]. 半导体学报, 2015, 36(5): 054011-6. DOI: 10.1088/1674-4926/36/5/054011
作者姓名:于新海  柴常春  乔丽萍  杨银堂  刘阳  席晓文
基金项目:国家重点基础研究发展计划;国家自然科学基金
摘    要:本文对受脉宽影响的过剩载流子浓度分布及高功率微波(HPM)扰乱易发性进行解析建模,并利用仿真结果和实验数据对模型进行验证。利用机理分析与模型推导,得到过剩载流子主导闩锁效应中电流放大过程的结论。结果表明,P型衬底中的过剩载流子浓度分布确与HPM脉宽有关,HPM扰乱电压阈值Vp随着脉宽增宽而减小,同时这一变化存在一个拐点,这是由于P型衬底中的过剩载流子累积效应将随着时间推移而受到抑制。文中首次提出HPM脉宽扰乱效应的物理本质是过剩载流子的累积效应。实验验证认为,Vp解析模型能够对CMOS反相器的HPM扰乱易发性进行可靠和准确的预测,并同时考虑工艺、环境温度及版图参数等因素。从模型中可以得到,版图参数LB对脉宽扰乱效应有显著影响:LB较小的CMOS反相器更容易受到HPM的扰乱,这一结论将有助于提出反相器免于HPM扰乱的加固措施。

关 键 词:complementary metal oxide semiconductor  upset  high power microwave  pulse-width
收稿时间:2014-08-03

Modeling and analysis of the HPM pulse-width upset effect on CMOS inverter
Yu Xinhai,Chai Changchun,Qiao Liping,Yang Yintang,Liu Yang and Xi Xiaowen. Modeling and analysis of the HPM pulse-width upset effect on CMOS inverter[J]. Chinese Journal of Semiconductors, 2015, 36(5): 054011-6. DOI: 10.1088/1674-4926/36/5/054011
Authors:Yu Xinhai  Chai Changchun  Qiao Liping  Yang Yintang  Liu Yang  Xi Xiaowen
Affiliation:Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics,Xidian University, Xi'an 710071, China
Abstract:We derive analytical models of the excess carrier density distribution and the HPM (high-power microwave) upset susceptibility with dependence of pulse-width, which are validated by the simulated results and experimental data. Mechanism analysis and model derivation verify that the excess carriers dominate the current amplification process of the latch-up. Our results reveal that the excess carrier density distribution in P-substrate behaves as pulse-width dependence. The HPM upset voltage threshold Vp decreases with the incremental pulse-width, while there is an inflection point which is caused because the excess carrier accumulation in the P-substrate will be suppressed over time. For the first time, the physical essence of the HPM pulse-width upset effect is proposed to be the excess carrier accumulation effect. Validation concludes that the Vp model is capable of giving a reliable and accurate prediction to the HPM upset susceptibility of a CMOS inverter, which simultaneously considers technology information, ambient temperature, and layout parameters. From the model, the layout parameter LB has been demonstrated to have a significant impact on the pulse-width upset effect: a CMOS inverter with minor LB is more susceptible to HPM, which enables us to put forward hardening measures for inverters that are immune from the HPM upset.
Keywords:complementary metal oxide semiconductor  upset  high power microwave  pulse-width
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