| Abstract: | The direct simulation Monte Carlo (DSMC) method is a particle-based numerical modeling technique. It is recently used for simulating gaseous flow in micro-electro-mechanical-systems (MEMS) where micron-scale features become important. In this paper, numerical simulations of fluid flow in micro-channels are carried out using the DSMC method. The details in determining the parameters critical for DSMC applications in micro-channels are provided. Streamwise velocity distributions in the slip-flow regime are compared with the analytical solution based on the Navier–Stokes equations with slip velocity boundary condition. Satisfactory agreements have been achieved. Effects of the entrance and exit regions on simulation results are discussed. Simulations are then extended to transition flow regime (Kn>0.1) and compared with the analytical solution. It is shown that the results are distinguished with the analytical solutions, which fail to predict the flow due to the break down of continuum assumption. It is indicated that the gradient of the pressure along the channel direction dominates the motion of the fluid flow. |
