| PEMSIP法沉积的TiN涂层对硬质合金刀具切削性能的影响 |
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| 引用本文： | 王玉魁,韩会民.PEMSIP法沉积的TiN涂层对硬质合金刀具切削性能的影响[J].工具技术,1995,29(4):36-39. |
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| 作者姓名： | 王玉魁 韩会民 |
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| 作者单位： | 大连理工大学 |
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| 摘 要： | 氮气分压增加使等离子体增强磁控溅射离子镀（ＰＥＭＳＴＰ）ＴｉＮ涂层的相组成朝著富氮相及其含量增加的方向发展。由Ｔｉ２Ｎ和ＴｉＮ两相组成的涂层硬度最高，可达ＨＫ２５００；由Ｔｉ２Ｎ和ＴｉＮ两相组成的刀具涂层使硬质合金刀具切削力下降，可明显提高刀具使用寿命．
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| 关 键 词： | TiN涂层，等离子体增强磁控溅射离子镀 |
The Influence of TiN Coatings Deposited on the Carbide Tools by Plasma Enhanced Magnetron Sputter Ion Plating on Cutting Properties |
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| Wang Yukui et al.The Influence of TiN Coatings Deposited on the Carbide Tools by Plasma Enhanced Magnetron Sputter Ion Plating on Cutting Properties[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),1995,29(4):36-39. |
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| Authors: | Wang Yukui |
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| Affiliation: | Wang Yukui et al |
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| Abstract: | The variation of component phases of TiN coatings,depeited by plasmaenhanced magnetron sputter ion plating(PEMSIP) trends towards the formation of nitrides rich in nitrogen and the increase of its content with the increase of N2 partial paressure. The microhardness of the coatings made of Ti2N and TiN is the hardest(HK2500), The coatings made of Ti2N and TiN make the cutting force of carbide tools decrease, and make.the tool lifen Increase. |
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| Keywords: | TiN Coating PEMSIP |
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