Sensing of CO2 at room temperature using work function readout of (hetero-)polysiloxanes sensing layers

Organically modified silicates based on primary amino groups are known to be CO₂ sensitive, as they can undergo a reversible acid base reaction. In order to generate detectable CO₂ signals and to limit the cross-sensitivity to humidity, some sources suggest that these materials should be operated at higher temperatures (50-70 °C). In this paper, a new variant of CO₂ sensing is to be presented, namely a combination of work function readout and organically modified silicates, which yields CO₂ detection even at room temperature. Kelvin probe measurements are used for work function readout. The layers are intended to be used in a “Floating Gate Field Effect Transistors” (FGFETs) sensing platform (mySens) by Micronas. The reversible interaction of CO₂ with spin-coated heteropolysiloxane sensitive layers results in changes of the work function with typical signal heights of 15-20 mV (change from 400 to 4000 ppm CO₂) and response times of only a few minutes. Also, results will be presented regarding variations in the chemical nature of the films. The findings summarized in this paper point towards the possibility of a new room temperature CO₂ sensor, which comprises fast response times and sufficient sensitivity for ambient CO₂ variations.