Liquid-state motion sensing

This paper demonstrates a liquid droplet-based motion sensing system which has the advantages of simple fabrication, low power consumption and digital signal processing. The sensor consists of a dielectric substrate patterned with an array of microelectrodes, and a saline droplet as the proof mass. Once an external linear acceleration is applied, the inertial force moves the droplet on the micropatterned substrate. The acceleration is determined from the movement profile detected by the microelectrodes. In order to enhance the threshold and the sensitivity of motion sensing, two surface treatment approaches are utilized to create superhydrophobic surfaces. The result shows that the minimal sliding angle that can move a 20 μl droplet on the superhydrophobic surface is lower than 1°, corresponding to a threshold of lower than 0.017 g. A lumped-parameter model is developed to estimate the dynamic behavior of the proposed system. The result shows that the frequency response of the droplet-based sensor is more significant at low frequencies than at high frequencies, which is distinct from solid-state accelerometers. Measurement under a constant acceleration shows that the predicted value derived from the measurement has a good match with the actual applied acceleration, validating the proposed system as a viable alternative for motion sensing.