Neue Vorvakuumpumpe: Schnelles Evakuieren dank Membran‐ Stabilisierungssystem. New roughing pump: Fast Evacuation thanks to Diaphragm Stabilization System |
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Authors: | Uwe Rothe |
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Abstract: | Diaphragm pumps are used at turbomolecular pumps to generate rough vacuum. They are characterized by high suction speed, which however deteriorate when the working pressure decreases. This is caused by the difference between the working pressure of the pump and the ambient pressure. The larger the pressure difference, the more the elastic diaphragm bulges, lowering the effective input volume of the pump. This problem is alleviated by a newly developed diaphragm stabilization system. Diaphragm roughing pumps equipped with this system pump down faster than pumps without the system. Due to the enhanced suction speed, they also ensure greater process reliability. The first application of the diaphragm stabilization system (patent applied for) is in a newly developed diaphragm roughing pump. This pump is driven by a compact, brushless DC motor with very great efficiency. The pump is available in 24‐volt DC and 90‐ to 264‐volt, 50/60‐Hz AC versions. OEM and portable versions are available. |
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