Low‐Vacuum Low‐Cost Deposition of Tribological Coatings |
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| Authors: | G N Strauss H K Pulker M Meyer P Hatto C Davis H Jehn M Balzer C Misiano V Silipo E Olzi R Molena F Passareti |
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| Affiliation: | 1. Univ Innsbruck (A), (I);2. DaimlerChrysler (D);3. Ion Bond (GB);4. FEM (D);5. CETeV (I);6. now Romana Film Sottilli, Roma (I);7. CNR.Te.M.P.E (I) |
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| Abstract: | TiN coatings of some microns in thickness were deposited by different reactive plasma deposition technologies such as Magnetron Sputtering Magnetically Assisted, Arc Source Ion Plating and Sputter Ion Plating Plasma Assisted on various unheated metal parts. The source to substrate distances was between 8 and 25cm. Deposition were performed in specially designed plants in the pressure range between 10‐3–10‐1 mbar and under variable vacuum and plasma conditions. The experiments were carried out with the intention of obtaining isotropic coatings on substrates of complex geometry. Thickness distribution, morphology, hardness and tribological properties of these coatings were investigated and correlated with the gas pressures and the measured plasma parameters during deposition. The aim of this work was to find effective processes and conditions for the reliable low cost deposition of hard coatings at relatively high gas pressures. The investigations were supported by the European Union in the TIPCOAT‐Project: Brite EuRam BE‐3815/Contract BRPR‐CT97‐0397 |
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| Keywords: | Tribological coatings Magnetron Sputtering Ion plating Arc source Plasma parameter TiN |
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