| 强流溅射源负离子出束实验研究 |
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| 引用本文： | 王晓飞,包轶文,秦久昌. 强流溅射源负离子出束实验研究[J]. 原子能科学技术, 2004, 38(3): 239-242 |
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| 作者姓名： | 王晓飞 包轶文 秦久昌 |
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| 作者单位： | 中国原子能科学研究院,核物理研究所,北京,102413 |
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| 摘 要： | 在离子源实验台架上，利用200型强流溅射离子源进行8种元素的负离子出束实验研究。这些负离子对应元素的电子亲合势大部分接近或小于零，负离子难以形成。实验中尝试使用不同的靶材料和辅助气体产生负离子，以提高负离子束的束流强度。
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| 关 键 词： | 强流溅射源 负离子 束流强度 电子亲合势 |
| 文章编号： | 1000-6931(2004)03-0239-04 |
Production Study of Negative Ion Beam on the Intensive Sputter Source |
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| WANG Xiao-fei,BAO Yi-wen,QIN Jiu-chang China Institute o f Atomic Energy,P.O.Box -,Beijing ,China. Production Study of Negative Ion Beam on the Intensive Sputter Source[J]. Atomic Energy Science and Technology, 2004, 38(3): 239-242 |
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| Authors: | WANG Xiao-fei BAO Yi-wen QIN Jiu-chang China Institute o f Atomic Energy P.O.Box - Beijing China |
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| Affiliation: | WANG Xiao-fei,BAO Yi-wen,QIN Jiu-chang China Institute o f Atomic Energy,P.O.Box 275-62,Beijing 102413,China |
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| Abstract: | Production study of negative ion beam from 8 kinds of element was performedwith 200 Model intensive sputter source. The formation of negative ions from theseelements is difficult dut to electron affinity of these negative ions is near to or less thanzero. Different target materials and auxiliary gases were tried out in the experiment inorder to increase the beam intensity. |
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| Keywords: | negative ion electron affinity beam intensity |
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