| 3通道短波红外光谱可识别列阵探测器的研制 |
| |
| 引用本文： | 程实平 严义埙 等. 3通道短波红外光谱可识别列阵探测器的研制[J]. 红外与毫米波学报, 1994, 13(6): 401-404 |
| |
| 作者姓名： | 程实平 严义埙 等 |
| |
| 作者单位： | 中国科学院上海技术物理研究所 |
| |
| 摘 要： | 用掩模分离方法或薄膜刻蚀方法制作出多波段微型滤光片列阵，交过类微型焦平面色散元件与列阵探测器结合，构成光谱可识别列阵探测器，报道了3通道短波红外滤光片列阵的设计和制作，以及4元3通道光谱可识别探测器的研制。
|
| 关 键 词： | 红外光谱 分光技术 列阵探测器 薄膜刻蚀 |
DEVELOPMENT OF THREE-CHANNEL SHORT-WAVE IR SPECTRUM DISTINGUISHABLE DETECTOR ARRAY |
| |
| Cheng Shiping,Yan Yixun,Zhang Fengshan,Xu Buyun,Zhu Cuiyuan. DEVELOPMENT OF THREE-CHANNEL SHORT-WAVE IR SPECTRUM DISTINGUISHABLE DETECTOR ARRAY[J]. Journal of Infrared and Millimeter Waves, 1994, 13(6): 401-404 |
| |
| Authors: | Cheng Shiping Yan Yixun Zhang Fengshan Xu Buyun Zhu Cuiyuan |
| |
| Abstract: | The multi-pass band micro-filters array was fabricated by the techniques of masking and lifting-off or etching of the films. The spectrally distingulshable detectors array is composed of the detectors array and the micro-filters array.The design and fabrication of the threer-channel short wave infrared filters array,and the development of the spectrum distinguishable detectors array are reported. |
| |
| Keywords: | infrared spectrum spectral dispersion technology detector array. |
| 本文献已被 CNKI 维普 等数据库收录！ |
| 点击此处可从《红外与毫米波学报》浏览原始摘要信息 |
|
点击此处可从《红外与毫米波学报》下载全文 |
