| 一种新型电容微加速度计的设计与仿真 |
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| 引用本文： | 郑晓虎,朱获. 一种新型电容微加速度计的设计与仿真[J]. 机械科学与技术, 2006, 25(3): 281-283 |
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| 作者姓名： | 郑晓虎 朱获 |
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| 作者单位： | 南京航空航天大学,机电学院,南京,210016;淮阴工学院,机械系,淮安,223001;南京航空航天大学,机电学院,南京,210016 |
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| 基金项目： | 国防科技应用基础研究基金 |
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| 摘 要： | 提出一种带有杠杆机构的电容检测微型加速度计。通过外来加速度使质量块经杠杆将力放大施加到弹性梁上产生位移、改变检测电容间距得到与加速度成比例的电压信号,从而测出加速度大小。研究表明:这种加速度计的灵敏度可明显提高。同时采用有限元方法进行了仿真模拟,结果显示系统测量范围可达100 g、工作模态固有频率为209036 Hz。
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| 关 键 词： | 微型电子机械系统 电容检测 加速度计 仿真模拟 |
| 文章编号： | 1003-8728（2006）03-0281-03 |
| 收稿时间： | 2004-11-28 |
| 修稿时间： | 2004-11-28 |
Novel Design And Simulation of a Capacitance Type Novel Micro-accelerometer |
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| Zheng Xiaohu,Zhu Di. Novel Design And Simulation of a Capacitance Type Novel Micro-accelerometer[J]. Mechanical Science and Technology for Aerospace Engineering, 2006, 25(3): 281-283 |
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| Authors: | Zheng Xiaohu Zhu Di |
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| Abstract: | The paper puts forward a new type of micro-accelerometer with lever mechanisms which uses capacitance detection. The force applied to an elasticity beam was amplified through the lever. The distahoe of the capacitance was altered, therefore the voltage sign proportional to acceleration could be measured, thus showing the acceleration, and the sensitivity of the accelerometer is remarkably higher. Simulation was carried out with Ansys software, and its results indicate that the range of the micro-accelerometer is 100 g and that the natural frequency of work mode is 209036 Hz. |
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| Keywords: | MEMS(micro-electro-mechanical system) capacitance accelerometer simulation |
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