| 声激励共振法测量微机械材料的杨氏模量 |
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| 引用本文： | 顾利忠,左铭旺,苏菲. 声激励共振法测量微机械材料的杨氏模量[J]. 声学技术, 2000, 19(4): 187-189 |
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| 作者姓名： | 顾利忠 左铭旺 苏菲 |
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| 作者单位： | 清华大学自动化系,北京,100084 |
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| 基金项目： | 国家自然科学基金资助项目!(批准号 :6 9885 0 0 5 ) |
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| 摘 要： | 微机械材料的杨氏模量测量是随着微机械构件的产生而提出的一项新技术。文章综述了已有的测量微机械材料杨氏模量的方法。提出了用声激励共振法来测量微机械材料的杨氏模量。这种方法具有测试装置简单、测量容易、精度高等特点。
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| 关 键 词： | 杨氏模量 声激励 微机械材料 |
| 收稿时间： | 1999-11-06 |
| 修稿时间： | 1999-12-15 |
Acoustically-excited method for Young''s modulus measurement of micro-machined materials |
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| GU Li-zhong,ZUO Ming-wang and SU Fei. Acoustically-excited method for Young''s modulus measurement of micro-machined materials[J]. Technical Acoustics, 2000, 19(4): 187-189 |
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| Authors: | GU Li-zhong ZUO Ming-wang SU Fei |
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| Affiliation: | Department of Automation, Tsinghua University, Beijing 100084, China;Department of Automation, Tsinghua University, Beijing 100084, China;Department of Automation, Tsinghua University, Beijing 100084, China |
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| Abstract: | Young's modulus measurement of micro machined materials is a new technique proposed with the appearance of the micro machined parts. This article summarized the published methods for Young's modulus measurement of the micro machined materials, and proposed an acoustically excited method for measurement of the micro machined materials. This method has some features such as testing devices simple, easy operation and high accuracy. |
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| Keywords: | Young's modulus acoustically excited micromachined material |
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