Phase evolution of electron-beam evaporated Pb(Zr,Ti)O3 thin films

Solid phase reactions among electron-beam deposited PbO, ZrO₂ and TiO₂ in the thin film state as distinct from those occurring in the bulk state are described under varied annealing conditions leading to growth of perovskite PZT phase. Loss of PbO by direct high temperature (700 °C) anneal led to the growth of cubic A₂B₂O_7−x pyrochlore as well as an AB₃O₇ phase of monoclinic structure. A lower temperature initial anneal at 600 °C in O₂ ambient minimises PbO loss through phase transformation to tetragonal Pb₃O₄ and better crystallised oxide phases partially react to form pyrochlore as well as perovskite PZT. This partial reaction is kinetically driven as it goes to completion in ∼4 h resulting in transformation of pyrochlore to perovskite phase. At high temperature (800 °C) A₂B₂O_7−x phase converts to PZT perovskite and the AB₃O₇ dissociate to yield TiO₂ secondary phase inclusion in the PZT film.