X射线测厚仪刻度校正模型的研究

本文提出了新的模型来描述X射线测厚仪中射线在穿过被测物质时的衰减规律。利用已知厚度的若干标定片的实测数据点，针对不同数据点数量、不同数据点分布等多种情况，对比此模型和其他文献中的刻度校正模型。结果表明，由此模型计算的衰减曲线与实验数据符合良好，且当标定数据点数量减少及分布改变时，此模型仍具有较高的精度，误差的稳定性超过其他模型。

Research on Calibration Model of X-ray Thickness Gauge

A new model which describes the attenuation of X-ray in the X-ray thickness gauge was proposed. Based on measured data of several calibration plates whose thickness is already known, this model was compared with other gauging models mentioned in other papers according to different numbers of data points, different data point distributions and other situations. The calculated values with the new model are in good agreement with experimental data. When the number of data points decreases and the distribution of data points changes, the new model maintains a hign accuracy and presents a better numerical stability than other models.