| 声表面波方法表征低k纳米多孔黑钻石绝缘薄膜的杨氏模量 |
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| 引用本文： | 单兴锰,肖夏,刘亚亮. 声表面波方法表征低k纳米多孔黑钻石绝缘薄膜的杨氏模量[J]. 半导体学报, 2010, 31(8): 082002-5 |
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| 作者姓名： | 单兴锰 肖夏 刘亚亮 |
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| 摘 要： | 激光激发声表面波技术探测薄膜的杨氏模量是一种快速、准确、无损的方法。在薄膜表面，声表面波通过激光短脉冲与介质材料之间的热弹作用被激发。在分层结构的薄膜上传播时，表面波会发生色散现象，通过对实验测得的表面波色散曲线和理论计算的到的色散曲线进行匹配，可以获得薄膜的杨氏模量。在本实验中，采用紫外波段激光脉冲可以产生具有很宽频谱范围的表面波信号，色散曲线的范围可达180 MHz。应用声表面方法对生长于Si(100)衬底上，具有不同厚度的低k纳米多孔黑钻石绝缘薄膜的杨氏模量进行了成功探测。
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| 关 键 词： | 互连布线；杨氏模量；低k纳米多孔薄膜；声表面波；黑钻石薄膜 |
| 收稿时间： | 2010-02-22 |
| 修稿时间： | 2010-04-14 |
Young's modulus characterization of low-k films of nanoporous Black DiamondTM by surface acoustic waves |
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| Shan Xingmeng,Xiao Xia and Liu Yaliang. Young's modulus characterization of low-k films of nanoporous Black DiamondTM by surface acoustic waves[J]. Chinese Journal of Semiconductors, 2010, 31(8): 082002-5 |
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| Authors: | Shan Xingmeng Xiao Xia Liu Yaliang |
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| Affiliation: | School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, China;School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, China;School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, China |
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| Abstract: | The laser-generated surface acoustic wave (SAW) technique is an accurate, fast and nondestructive solution to determine the mechanical properties of ultra thin films. SAWs are dispersive during the wave propagation on the layered structure. The Young's moduli of thin films can be obtained by matching the experimentally and theoretically calculated dispersive SAW curves. A short ultraviolet laser pulse is employed to generate the broad spectral range of the dispersive SAWs. The frequency range of dispersive SAWs in this study reaches 180 MHz, which is adequate for the SAW technique applied for the investigated samples. In this work, the Young's moduli of a series of nanoporous Black DiamondTM low dielectric constant (low-k) films deposited on a Si (100) substrate are characterized successfully by the SAW technique. oindent |
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| Keywords: | ULSI interconnect SAWs Young's modulus Black DiamondmTM nanoporous low-k film oindent |
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