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Production technology of large-area multicrystalline silicon solar cells |
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| Authors: | Shuich Fujii Yuko Fukawa Hiroaki Takahashi Yosuke Inomata Kenichi Okada Kenji Fukui Katsuhiko Shirasawa |
| Abstract: | In 1996 a conversion efficiency of 17.1% had been obtained on 15 cm×15 cm mc-Si solar cell. In this paper, large-scale production technology of the high-efficiency processing will be discussed. Enlarging reactive ion etching (RIE) equipment size, technology of passivation, and fine contact grid with low resistance by screenprinted metallization, which is firing through PECVD SiN, have been investigated. |
| Keywords: | Large-scale production technology High-efficiency solar cell RIE texture Firing through PECVD SiN |
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