| 梳状电容微加速度计结构设计和分析 |
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| 引用本文： | 黄书琴,郝永平,张德智,王健.梳状电容微加速度计结构设计和分析[J].探测与控制学报,2004,26(4):21-24. |
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| 作者姓名： | 黄书琴 郝永平 张德智 王健 |
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| 作者单位： | 1. 沈阳理工大学,CAD/CAM技术研究与开发中心,辽宁,沈阳,110168
2. 沈阳理工大学装备工程系,辽宁,沈阳,110168 |
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| 摘 要： | 阐述了双侧梳状电容微加速度计的基本结构和工作原理，运用了计算机辅助软件对其进行建模和仿真，借助该模型分析了在1g加速下梁的长度变化对系统灵敏度的影响和系统对正弦激脉冲输入信号的响应特性，为加速度计的结构优化设计提供了依据。
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| 关 键 词： | 梳齿状电容微加速度计 灵敏度 建模和仿真 |
| 文章编号： | 1008-1194(2004)04-0021-04 |
Structural Design and Simulation of Multi-finger Capacitive Micro-accelerometer |
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| HUANG Shu-qin,HAO Yong-ping,ZHANG De-zhi,WANG Jian.Structural Design and Simulation of Multi-finger Capacitive Micro-accelerometer[J].Journal of Detection & Control,2004,26(4):21-24. |
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| Authors: | HUANG Shu-qin HAO Yong-ping ZHANG De-zhi WANG Jian |
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| Affiliation: | HUANG Shu-qin1,HAO Yong-ping1,ZHANG De-zhi2,WANG Jian2 |
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| Abstract: | In this paper, the basic structure and operation principle of multi-finger capacitive micro-accelerometer are expatiated, the modeling and simulation of the micro-accelerometer are made by using a new kind of computer sofeware. Simulative results indicate that the system sensitivity is seriously influenced by the length of the beam. The system responses to sinusoidal and pulse input signals are also investigated, which offers basis for the structure design of micro-accelerometer. |
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| Keywords: | capacitive micro-accelerometer sensitivity modeling and simulation |
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