| 应力集中式多晶硅薄膜压力传感器 |
| |
| 引用本文： | 陶文中,高明光.应力集中式多晶硅薄膜压力传感器[J].传感器与微系统,1998,17(3):32-34. |
| |
| 作者姓名： | 陶文中 高明光 |
| |
| 作者单位： | [1]东北传感技术研究所 [2]大庆石化总厂化工二厂 |
| |
| 摘 要： | 介绍一种以多晶硅薄膜为敏感材料的压力传感器。该传感器利用了双岛结构膜片的应力集中效应，灵敏度得到提高，且具有良好的线性度和过载能力。
|
| 关 键 词： | 应力集中式，多晶硅薄膜，压力传感器 |
Polysilicon Thin Film Pressure Sensor with Stress Concentration |
| |
| Abstract: | Abstract A polysilicon thin film pressure sensor is presented. It utilizes polysilicon thin film as stress sensitive material. The sensor achieved dramatically greater sensitivity due to stress concentration effects. It has good linearity and has extensive application prospects on the development of high temperature pressure sensor. |
| |
| Keywords: | |
| 本文献已被 CNKI 维普 等数据库收录！ |
