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Noncrystalline micromachining of amorphous alloys using femtosecond laser pulses
Authors:Xinlin Wang  Peixiang Lu  Nengli Dai  Changrui Liao  Lin Liu
Affiliation:a Wuhan National Laboratory for Optoelectronics and School of Optoelectronics Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
b School of Electrical Engineering, Nanhua University, Hengyang 421001, China
c School of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
Abstract:Femtosecond laser micromachining of a Zr-based amorphous alloy in air, including measuring the ablation threshold, micro-drilling and trenching, was investigated. The threshold of ablating this amorphous alloy was determined by experiment. Laser-induced ablation and associated damage were examined by means of optical microscope, scanning electron microscopy, transmission electron microscopy and electron diffraction diagram. The results show that conventional processing method induced defects in the vicinity of machined area, such as crystallization, molten trace and spatter, were absent in femtosecond laser ablation area with selected parameters. This indicates that femtosecond laser ablation is a promising method for micromachining amorphous alloys without crystallization.
Keywords:Laser processing   Metals and alloys   Amorphous alloys   Femtosecond laser micromachining   Noncrystalline
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