基于微放电加工元件轮廓测量的探针制造

为了推动微加工和微机械技术的进步，微型零件轮廓和尺度测量方法的发展非常重要．可行方法之一就是使用带微探头的小型三维轮廓测量仪．这种仪器的探头必须针对某个零件的测量，按照最佳外形制造．微放电加工有着极小加工力，可用于各种探头的制造，本研究中用它进行探头加工．用这种方法制造了多种探头，将其装在基于扫瞄隧道显微技术(STM)的小型三维轮廓测量仪上．所制造的探头已被成功地用于各种微元件测量，结果表明此方法可行．

Fabrication of Probes for Profile Measurement of Micro-EDM Manufactured Components

In order to facilitate the advancement of micro-fabrication and micromachine technologies, development of measurement methods for both profile and dimension of micro-components are essential. One of the methods available for this is a small three-dimensional profile measurement apparatus with micro-probes. For such an apparatus, the probes must be fabricated with optimal shape for individual part measurement. In this research, micro-electrical discharge machining (micro-EDM) which has extremely small machining force and is applicable for fabrication of various types of probes, is used for probe manufacturing. Various types of probes which are installed to the small three dimensional profile measuring apparatus based on principle of scanning tunneling microscopy (STM) are fabricated by the proposed method. The probes fabricated have been successfully used for the measurement of several micro-parts and the results show the effectiveness of the proposed method.