Electrical properties of Sm-doped bismuth titanate thin films prepared on Si (100) by metalorganic decomposition |
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Authors: | WL Liu HR Xia H Han |
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Affiliation: | a School of Physics and Microelectronics, Shandong University, Jinan 250100, PR China b National Laboratory of Crystal Materials, Shandong University, Jinan 250100, PR China c Department of Materials Science and Engineering, Shandong Institute of Light Industry, Jinan 250100, PR China |
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Abstract: | Samarium-doped bismuth titanate Bi4−xSmxTi3O12 (BSmT)] thin films have been grown on n-type Si (100) substrates using metalorganic decomposition and subsequent annealing at 700 °C for 1 h. X-ray diffraction analysis showed layered perovskite structures with a single phase in the films. The current-voltage characteristics displayed ohmic conductivity in the lower voltage range and space-charge-limited conductivity in the higher voltage range. The capacitance-voltage characteristics of Au/BSmT/Si (100) exhibited hysteresis loops due to the ferroelectricity and did not show large carrier injections. The fixed charge density and the surface state density of BSmT films on Si substrate were calculated to be in the range of 1011 cm−2 and 1012 cm−2 eV−1, respectively. |
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Keywords: | 73 40 77 55 77 80 81 20 |
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