| 常压下工作的微机械陀螺的频率和阻尼特性 |
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| 引用本文： | 刘晓为,陈宏,陈伟平,陆学斌,韩天. 常压下工作的微机械陀螺的频率和阻尼特性[J]. 传感技术学报, 2006, 19(5): 2268-2271 |
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| 作者姓名： | 刘晓为 陈宏 陈伟平 陆学斌 韩天 |
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| 作者单位： | 哈尔滨工业大学MEMS中心,哈尔滨,150001 |
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| 摘 要： | 对微机械陀螺振动式陀螺的频率和阻尼特性进行了分析和模拟.以设计的一种微机械陀螺为模型,对其驱动和检测方向的阻尼力系数进行了计算,利用MATLAB模拟了阻尼对灵敏度以及频率特性的影响.得出了不仅频率匹配对微机械陀螺的性能有重要影响,而且阻尼匹配也会影响陀螺的灵敏度和频率特性.
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| 关 键 词： | 微机械电子系统 陀螺 阻尼匹配 频率特性 |
| 文章编号： | 1004-1699(2006)05-2268-04 |
| 修稿时间： | 2006-07-01 |
Frequency and Damping Characteristics of Micro-Machined Gyroscope Working at Atmospheric Pressure |
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| LIU Xiao-Wei,CHEN Hong,CHEN Wei-ping,LU Xue-bin,HAN Tian. Frequency and Damping Characteristics of Micro-Machined Gyroscope Working at Atmospheric Pressure[J]. Journal of Transduction Technology, 2006, 19(5): 2268-2271 |
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| Authors: | LIU Xiao-Wei CHEN Hong CHEN Wei-ping LU Xue-bin HAN Tian |
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| Affiliation: | MEMS Center, Harbin Institute of Technology, Harbin 150001 China |
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| Abstract: | The damping and frequency characteristics of a micro-machined vibratory gyroscope are discussed and simulated. The damping coefficients of the drive and sense direction are calculated based on a micro-machined gyroscope model. The influence of damping to the sensitivity and frequency characteristics is researched with MATLAB. The conclusion is that not only the match of two modes' frequencies influent the gyroscopes' performances, but also the match of damping in two directions affects the sensitivity and frequency characteristics significantly. |
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| Keywords: | MEMS gyroscope damping match frequency characteristics |
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