微型FAIMS生化传感器的设计与制作

根据高场非对称波形离子迁移谱（high-field asymmetric waveform ion mobility spectrometry,FAIMS）原理,设计了一种微型生化传感器.采用真空紫外灯离子源在大气压环境下对样品进行电离,紫外灯发射的光子能量为10.6 eV,波长116.5 nm.迁移区由上下两块紫铜金属平板电极构成,尺寸为10 mm×10 mm×1 mm.完成了高场非对称方波电源的设计,所输出的射频电压最大值为1 180 V,最小值为-480 V,频率189 kHz,占空比30%.以丙酮为实验样品,通过高场非对称波形离子迁移谱-质谱联用技术进行传感器的性能验证实验,实验结果表明所设计的基于FAIMS原理的生化传感器可以实现离子分离和过滤功能.基于SIMION软件对FAIMS生化传感器进行仿真分析,仿真与实验结果相符.最后利用硅片双面感应耦合等离子体（inductively coupled plasma,ICP）刻蚀和硅-玻璃键合工艺,加工出基于微机电系统（micro electro mechanical system,MEMS）技术的微型FAIMS传感器芯片.采用频率2 MHz、最大电压364 V、占空比30%的高场非对称方波电压进行FAIMS芯片实验.载气流速80 L/h,补偿电压从-10 V～3 V以0.1 V的步长扫描,得到了丙酮的FAIMS谱图,验证了芯片的性能.

Design and Fabrication of Miniature FAIMS Biochemical Sensor

A novel biochemical sensor was designed based on FAIMS（high-field asymmetric waveform ion mobility spectrometry） theory.The sample ions were created at ambient pressure by VUV lamp ion source with photon discharge of 10.6 eV in power and 116.5 nm wave length.The drift tube was composed of two copper planar electrodes with the volume of 10 mm×10 mm×1 mm.A high-field asymmetric rectangular waveform power was designed to provide a RF voltage（the maximum voltage of ＋1 180 V and the minimum voltage of-480 V） at the frequency of 189 kHz with the duty cycle of 30%.Acetone was adopted as the experiment sample and FAIMS-MS technology was used to test the performance of biochemical sensor.Experimental results show that ions can be separated and filtrated by the biochemical sensor based on FAIMS theory.FAIMS simulation results based on the SIMION software were in agreement with the experimental results.Finally,the miniature FAIMS sensor chip based on micro electro mechanical system（MEMS） technology was fabricated with inductively coupled plasma（ICP） etching on two sides of the silicon and double silicon-glass bonding,which was investigated with high-field asymmetric rectangular waveform power with the peak voltage of 364 V at the frequency of 2 MHz and the duty cycle of 30%.Under the conditions of the carrier gas flow rate of 80 L/h and the compensation voltage sweeping from-10 V to 3 V at 0.1 V step,FAIMS spectra of acetone were acquired and the performance of the chip was verified.