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三层亚波长光栅结构的透射特性
引用本文:褚金奎,张英杰,王志文,金仁成.三层亚波长光栅结构的透射特性[J].纳米技术与精密工程,2013(5):442-446.
作者姓名:褚金奎  张英杰  王志文  金仁成
作者单位:[1]大连理工大学精密与特种加工教育部重点实验室,大连116024 [2]辽宁省微纳米技术及系统重点实验室,大连116024
基金项目:国家重点基础研究发展计划(973)资助项目(2011CB302101,2011CB302105);中央高校基本科研基金资助项目(DUT10ZD104).
摘    要:设计了一种具有三层结构的亚波长金属光栅,采用时域有限差分(FDTD)法对所设计的三层光栅结构进行仿真计算.与单层金属光栅相比,这种三层的光栅结构具有更好的滤波效果,其透射光谱中峰值可达77%,且能很好地抑制高波段的透射率.分析了各几何参数对所设计的光栅结构透射特性的影响,尤其是对透射光谱中0值位置的影响.结果表明0值位置主要受光栅缝宽、介质层高度和介质折射率的影响,而与金属层光栅的高度无关.其影响规律为偏振滤波器的设计提供了参考.

关 键 词:三层亚波长光栅  偏振滤波器  透射增强

Transmission Properties of Triple-Layer Subwavelength Grating
Chu Jinkui,Zhang Yingjie,Wang Zhiwen,Jin Rencheng.Transmission Properties of Triple-Layer Subwavelength Grating[J].Nanotechnology and Precision Engineering,2013(5):442-446.
Authors:Chu Jinkui  Zhang Yingjie  Wang Zhiwen  Jin Rencheng
Affiliation:1. Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China ; 2. Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian 116024, China)
Abstract:A type of triple-layer subwavelength metallic grating structure was designed and simulated uti- lizing finite-difference time-domain (FDTD) method. Compared with single metallic grating, the new grating structure can achieve better filtering result. For the triple-layer grating transmission spectrum, the peak transmission efficiency is 77% and the transmission of higher wavelength is well suppressed. The in- fluence of geometrical parameters on transmission, especially on the zero position of the spectrum, was investigated. The results demonstrate that the zero position is affected by grating width, dielectric layer thickness and dielectric refractive index, but is independent of metallic layer thickness. The influence rules offer a useful reference for the design of polarizing filters.
Keywords:triple-layer subwavelength grating  polarization filter  transmission enhanced
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