水银微流体惯性开关的研制

针对传统微机械“固一固”型触点开关存在信号跳变、触点磨损等缺点，研制了一种利用水银液滴在变矩形截面微通道中流动来实现通断的微流体惯性开关．结合解析分析和数值仿真确定了影响开关阈值的微阀门宽度、微通道深度、侧壁扩张角等关键结构参数，并将田口稳健设计方法用于参数的优化设计，利用响应面法和信噪比（SNR）优化得到了微阀门宽度、微通道深度、侧壁扩张角分别为175μm、245μm和8°；采用阳极键合和反应离子深刻蚀（DRIE）制作了硅微通道，利用溅射沉积方式沉积了约100nm厚的铬电极，并对开关样机进行了离心测试．实验测试结果表明，开关的闭合阈值为9．536g，与目标值9．8g的偏差为2．7％．

Development of Mercury Micro-Fluidic Inertial Switch

In order to overcome the disadvantages of the traditional micro-mechanical switch, such as sig- nal bounce and contact wear, a micro-fluidic inertial switch was developed based on solid-solid contact, which utilizes the moving mercury droplet in the microchannel with varying rectangular cross section to close the switch. The key structural parameters influencing acceleration threshold of microvalve width, mieroehannel depth and expansion angle were identified by means of analytical model and numerical sim- ulation. Taguchi robust design method was used to optimize the key structural parameters, and the opti- mal mierovalve width of 175 μm, microchannel depth of 245 μm and expansion angle of 8° were obtained by using response surface method and signal-noise ratio （SNR） calculation. Anodic bonding and deep re- active ion etching （DRIE） techniques were adopted to fabricate the silicon microehannel, sputtering method was employed to deposit the chromium electrode of 100 nm, and finally centrifuge test was con- ducted with the fabricated switch. Experimental results indicate that the acceleration threshold of the pro- totype is 9. 536g, 2.7% less than the required value of 9.8g.