| 浮法玻璃在线镀复合膜的力学性能 |
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| 引用本文： | 赵洪力,蔡永秀,杨雪梅,刘广利,张福成.浮法玻璃在线镀复合膜的力学性能[J].硅酸盐学报,2006,34(8):917-921. |
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| 作者姓名： | 赵洪力 蔡永秀 杨雪梅 刘广利 张福成 |
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| 作者单位： | 1. 燕山大学,河北省亚稳材料制备技术与科学重点实验室;燕山大学材料科学与工程学院,秦皇岛,河北,066004
2. 燕山大学,河北省亚稳材料制备技术与科学重点实验室 |
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| 摘 要： | 用化学气相沉积法在浮法玻璃上制备了复合薄膜.用台阶仪、纳米压痕和X射线衍射分别测定了薄膜厚度、弹性模量、纳米硬度和室温时薄膜的残余应力.实验结果表明:薄膜厚度为560.7nm,弹性模量为48.33GPa,纳米硬度值为10.65GPa,计算得到薄膜的残余应力值为-0.19GPa.对膜厚、气体的配比、流量、玻璃板的厚度、玻璃基体的化学成分等因素对薄膜残余应力的影响进行了讨论.
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| 关 键 词： | 浮法玻璃 化学气相沉积 复合膜 纳米压痕 残余应力 |
| 文章编号： | 0454-5648(2006)08-0917-05 |
| 收稿时间： | 01 13 2006 12:00AM |
| 修稿时间： | 04 20 2006 12:00AM |
MECHANICAL CHARACTERISTIC OF COMPOSITE THIN FILMS COATED BY ON-LINE DEPOSITION ON FLOAT GLASS |
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| ZHAO Hongli,CAI Yongxiu,YANG Xuemei,LIU Guangli,ZHANG Fucheng.MECHANICAL CHARACTERISTIC OF COMPOSITE THIN FILMS COATED BY ON-LINE DEPOSITION ON FLOAT GLASS[J].Journal of The Chinese Ceramic Society,2006,34(8):917-921. |
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| Authors: | ZHAO Hongli CAI Yongxiu YANG Xuemei LIU Guangli ZHANG Fucheng |
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| Abstract: | Composite film was prepared by on-line chemical vapor deposition on float glass. The film thickness, elastic modulus, nano-hardness and residual stress at room temperature were investigated by stepmeter, nano-indentation and X-ray diffraction. The experimental results show that the thickness of the composite film is 560.7 nm, its elastic modulus is 48.33 GPa, and its nano-hardness is 10.65 GPa. The calculated value of the residual stress is -0.19 GPa. The effect of film thickness, quantity and proportion of precursor gases, thickness and chemical composition of glass substrate on the residual stress of the thin film was discussed. |
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| Keywords: | float glass chemical vapor deposition composite film nano-indentation residual stress |
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