纳米碳化硅/硅纳米孔柱阵列湿敏性能研究

以硅纳米孔阵列(Si-NPA)为衬底,采用化学气相沉积法分别制备了SiC纳米颗粒/Si-NPA(nc-SiC/Si-NPA)和SiC纳米线/Si-NPA(nw-Si/Si-NPA)复合体系,并对其表面成分和形貌、室温湿敏性能进行了表征.实验结果表明,nc-SiC/Si-NPA和nw-SiC/Si-NPA均对水蒸气表现出...

Humidity sensing properties of nanostructured SiC/silicon nanoporous pillar array

Utilizing silicon nanoporous pillar array(Si-NPA)as substrates,two nanocomposite systems,SiC nanoparticle/Si-NPA(nc-SiC/Si-NPA)and SiC nanowire/Si-NPA(nw-SiC/Si-NPA)were prepared by a chemical vapor deposition method.The surface morphologies,chemical compositions and room-temperature humidity-sensing properties of the two systems were characterized.It was disclosed that the capacitance response of both nc-SiC/Si-NPA and nw-SiC/Si-NPA were highly sensitive to vapor.With the relative humidity(RH)changing from 11% to 95% and at a testing frequency of 100 Hz,a capacitance increment of 750% for nc-SiC/Si-NPA and 1050% for nw-SiC/Si-NPA was achieved,and the corresponding response/recovery times were determined to be 100/150 s and 10/10 s,respectively.The high humidity-sensitivity of the two systems was attributed to the enlargement of the sensing areas caused by the presentation of large quantities of nc-SiC and nw-SiC,while the short response/recovery times were due to the formation of effective vapor transportation paths provided by the array structure of Si-NPA.