Atomic Force Microscopy as a Nanometrology Tool: Some Issues and Future Targets

Diverse novel nanomaterials are being developed for a wide range of applications nowadays. Atomic force microscopy (AFM) assumes specific importance for the measurement of size and other related properties for such nanomaterials. The different aspects related to AFM modes of operation, nanopositioning, sensing systems as well as calibration for reliable characterization in order to meet the nanometrology requirements are discussed. The future targets in this context, set by nanometrology institutes, are also highlighted.