非金属材料表面粗糙度非接触测量试验研究

基于白光技术研究聚酰亚胺、F3和F46等3种非金属材料表面粗糙度的测量方法。分别利用基于白光共焦技术设计的粗糙度轮廓仪和基于白光干涉技术设计的三维形貌测量仪对三种不同材料的试件进行测量试验,重点关注上述3种非金属材料的吸光程度对测量精度的影响,并以触针式接触测量法的测量结果为参考,对测量结果进行不确定度评定。试验数据的分析结果表明,白光共焦法的测量不确定度为9.2%,白光干涉法的测量不确定度为9.8%,这2种基于白光技术的测量方法都是可行的。

Research on Non-contact Experimental Measuring Method about Nonmetal Roughness

The measuring roughness methods are researched about three kinds of nonmetal samples including polyimide, F3 and F46. The experiments to measure the samples are put forward using the roughness device which is designed based on white-light con-focal spectral tech nology, and the 3D shape measuring device which is designed based on white-light spectral interferometer. The absorbance error of the different nonmetal samples if focus on. The result of the contact roughness measuring methods is regard as the reference which is also used to evaluate the uncertainty of the measuring data. The experimental results show that the uncertainty of the white-light con-focal method is 9.2%, the uncertainty of the white-light interferometer is 9.8%. The two methods is feasible.