| 一种基于滑膜阻尼效应的新型微机械陀螺 |
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| 引用本文： | 陈永,焦继伟,熊斌,车录锋,李昕欣,王跃林. 一种基于滑膜阻尼效应的新型微机械陀螺[J]. 中国机械工程, 2004, 15(2): 103-105,149 |
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| 作者姓名： | 陈永 焦继伟 熊斌 车录锋 李昕欣 王跃林 |
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| 作者单位： | 中国科学院上海微系统与信息技术研究所,上海,200050 |
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| 基金项目： | 国家重点基础研究发展规划资助项目(G19990 3 3 10 1) |
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| 摘 要： | 介绍了一种基于滑膜阻尼效应的新型音叉式微机械陀螺。该陀螺包括两个驱动质量块和由各自驱动质量块支撑的检测质量块，通过检测质量块上的栅形电极与玻璃衬底上的固定检测电极之间的电容变化实现角速度信号的检测。对陀螺进行了结构设计和分析。在陀螺芯片的制作过程中，解决了深反应离子刻蚀过程中的根部效应和滞后效应等问题。初步测试结果表明，该陀螺灵敏度和非线性度比较理想。
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| 关 键 词： | 微机械陀螺 体微机械加工 栅形电极 滑膜阻尼 |
| 文章编号： | 1004-132X(2004)02-0103-03 |
A Novel Micromachined Gyroscope Based on Slide-film Damping Effects |
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| Chen YongJiao JiweiXiong BinChe LufengLi XinxinWang Yuelin. A Novel Micromachined Gyroscope Based on Slide-film Damping Effects[J]. China Mechanical Engineering, 2004, 15(2): 103-105,149 |
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| Authors: | Chen YongJiao JiweiXiong BinChe LufengLi XinxinWang Yuelin |
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| Affiliation: | Chen YongJiao JiweiXiong BinChe LufengLi XinxinWang Yuelin Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai,200050 |
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| Abstract: | A novel tuning fork gyroscope, based on silicon bulk micromachining technology, was reported. The gyroscope consists of two oscillating masses each of which supports one sensitive mass with bar electrodes. The Coriolis force led by angular speed applied to the device was sensed by the differential changes of capacitances between the bar electrodes and the electrodes on the glass substrate. The damage caused by the common footing effects and lag effects in deep reactive ion etching had been improved significantly. The measurement sensitivity of the sensors and the nonlinearity are very ideal. |
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| Keywords: | micromachined gyroscope bulk silicon micromachining bar electrodes slide-film damping |
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