| 基于变折扣因子EWMA的混合产品批间控制方法 |
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| 引用本文： | 侯明阳,郑英,艾兵,郑燕,张杰.基于变折扣因子EWMA的混合产品批间控制方法[J].控制理论与应用,2009,26(10):1137-1142. |
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| 作者姓名： | 侯明阳 郑英 艾兵 郑燕 张杰 |
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| 作者单位： | 华中科技大学,控制科学与工程系,湖北,武汉,430074 |
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| 基金项目： | 国家自然科学基金资助项目 |
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| 摘 要： | 批间(run-to-run,简称R2R)控制现今已被广泛用于半导体生产行业.指数加权移动平均(exponet weighted moving average.EWMA)是R2R控制的一种重要算法.折扣因子是EWMA控制期的主要参数.本文在模型中考虑了实际生产过程中混合产品少量多样的特点,引入了基于产品的变折扣因子EWMA控制算法,解决了产品切换时制程输出收敛速度过慢的问题.变折扣因子的引入提高了制程输出的响应速率而并不影响制程输出的稳定性.对实际过程的模拟仿真检验了该控制算法的可行性和优越性.
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| 关 键 词： | 批间控制 指数加权移动平均 折扣因子 基于产品的控制 |
| 收稿时间： | 2008/6/21 0:00:00 |
| 修稿时间： | 2008/12/22 0:00:00 |
EWMA for run-to-run control with time-varying discount factor in high-mix process |
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| Hou Ming-yang,zheng ying,Ai Bing,Zheng Yan and Zhang Jie.EWMA for run-to-run control with time-varying discount factor in high-mix process[J].Control Theory & Applications,2009,26(10):1137-1142. |
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| Authors: | Hou Ming-yang zheng ying Ai Bing Zheng Yan and Zhang Jie |
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| Affiliation: | Huazhong University of Science and Technology,Huazhong University of Science and Technology,Huazhong University of Science and Technology,Huazhong University of Science and Technology,Huazhong University of Science and Technology |
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| Abstract: | Run-to-run(R2R) control is widely adopted in semiconductor manufacturing industries. Exponent weighted moving average(EWMA) is an important R2R algorithm. Discount factor is a major parameter of EWMA controller. Considering
the high-mix characteristics of multi-product in practical manufacturing processes, we adopt the EWMA algorithm with time-varying discount factor to handle the slow convergence-rate in the product-switching phase. It improves the response speed while maintaining the stability of the process. The feasibility and advantages are demonstrated in simulations of practical processes. |
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| Keywords: | run-to-run control exponent weighted moving average discount factor product-based control |
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