| 薄膜生成过程的计算机模拟研究 |
| |
| 引用本文： | 于工,岳国珍.薄膜生成过程的计算机模拟研究[J].青岛科技大学学报,1996(3). |
| |
| 作者姓名： | 于工 岳国珍 |
| |
| 摘 要： | 根据多种制膜方法的共同点建立模型，用微机模拟源物质粒子在靶衬底上沉积成膜的全过程，研究了影响薄膜质量的工艺条件，如沉积速率、衬底温度等因素在微观成膜过程中所表现出来的物理细节及其规律。
|
| 关 键 词： | 薄膜物理 计算机模拟 膜生长 |
Computer Simulation of Film Growth |
| |
| Yu,Gong,Yue,Guozhen.Computer Simulation of Film Growth[J].Journal of Qingdao University of Science and Technology:Natutral Science Edition,1996(3). |
| |
| Authors: | Yu Gong Yue Guozhen |
| |
| Affiliation: | Yu Gong Yue Guozhen (Qingdao Institute of Chemical Technology) (Academy of Science of China) |
| |
| Abstract: | A physical model is built to simulate the overall process of film growth with a computer. By means of the microprocess in the film growth,the technological conditions that influence the characteristics of the films are studied. |
| |
| Keywords: | film physics computer simulation film growth |
| 本文献已被 CNKI 等数据库收录！ |
