A linear microactuator with enhanced design |
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| Authors: | J. Edler H.-D. Stölting M. Föhse H. H. Gatzen |
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| Affiliation: | Institute for Drive Systems and Power Electronics, Universit?t Hannover, Welfengarten 1, 30167 Hannover, Germany e-mail: edler@ial.uni-hannover.de, DE
Institute for Microtechnology, Universit?t Hannover, Callinstr. 30A, 30167 Hannover, Germany, DE
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| Abstract: | Based on a previously developed three phase variable reluctance (VR) linear microactuator design features, improving the dynamic properties, were investigated. The active part exhibits, as in the case of its predecessor, permalloy yokes and stator poles with teeth, and is fabricated using thin film technology. Improvements regarding the dynamic motor range were made by varying the number of phases. The new design has substantially improved the dynamic properties, due to the fact that the six phase design greatly reduced the location dependent driving force ripple. Received: 21 May 2001 / Accepted: 30 July 2001 |
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