| 脉冲激光沉积法合成Bi2Ti2O7介电薄膜及其光吸收特性 |
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| 引用本文： | 林元华,王建飞,何泓材,周剑平,周西松,南策文. 脉冲激光沉积法合成Bi2Ti2O7介电薄膜及其光吸收特性[J]. 半导体学报, 2005, 26(13): 74-77 |
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| 作者姓名： | 林元华 王建飞 何泓材 周剑平 周西松 南策文 |
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| 作者单位： | 清华大学材料系 新型陶瓷与精细工艺国家重点实验室，北京 100084;清华大学材料系 新型陶瓷与精细工艺国家重点实验室，北京 100084;清华大学材料系 新型陶瓷与精细工艺国家重点实验室，北京 100084;清华大学材料系 新型陶瓷与精细工艺国家重点实验室，北京 100084;清华大学材料系 新型陶瓷与精细工艺国家重点实验室，北京 100084;清华大学材料系 新型陶瓷与精细工艺国家重点实验室，北京 100084 |
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| 基金项目： | 国家高技术研究发展计划(863计划) , 国家重点基础研究发展计划(973计划) |
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| 摘 要： | 控制单脉冲能量为350mJ，脉冲频率为5Hz，控制合适的基底温度，利用脉冲激光沉积法制备出Bi2Ti2O7薄膜材料. 结果发现，SiO2基底温度控制在500～600℃，均能获得纯的Bi2Ti2O7薄膜. 其介电常数约18.2左右，随频率变化比较稳定，介电损耗约0.015左右，并且在紫外波段200～450nm有着较强的紫外吸收能力，有望在微电子器件中获得应用.
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| 关 键 词： | Bi2Ti2O7；脉冲激光沉积法；介电性能；光吸收 |
Preparation of Dielectric Bi2Ti2O7 Thin Film by Pulsed Laser Deposition Method and Its Optical Absorption Properties |
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| Lin Yuanhu,Wang Jianfei,He Hongcai,Zhou Jianping,Zhou Xisong and Nan Cewen. Preparation of Dielectric Bi2Ti2O7 Thin Film by Pulsed Laser Deposition Method and Its Optical Absorption Properties[J]. Chinese Journal of Semiconductors, 2005, 26(13): 74-77 |
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| Authors: | Lin Yuanhu Wang Jianfei He Hongcai Zhou Jianping Zhou Xisong Nan Cewen |
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| Affiliation: | State Key Laboratory of New Ceramics and Fine Processing,Department of Materials Science and Engineering,Tsinghua University,Beijing 100084,China;State Key Laboratory of New Ceramics and Fine Processing,Department of Materials Science and Engineering,Tsinghua University,Beijing 100084,China;State Key Laboratory of New Ceramics and Fine Processing,Department of Materials Science and Engineering,Tsinghua University,Beijing 100084,China;State Key Laboratory of New Ceramics and Fine Processing,Department of Materials Science and Engineering,Tsinghua University,Beijing 100084,China;State Key Laboratory of New Ceramics and Fine Processing,Department of Materials Science and Engineering,Tsinghua University,Beijing 100084,China;State Key Laboratory of New Ceramics and Fine Processing,Department of Materials Science and Engineering,Tsinghua University,Beijing 100084,China |
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| Abstract: | |
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| Keywords: | Bi2Ti2O7 pulsed laser deposition method dielectric properties optical absorption |
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