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Transfer technology using inorganic separation layer and apparatus for fabricating flexible OLED displays |
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| Authors: | Satoru Idojiri Masakatsu Ohno Koichi Takeshima Seiji Yasumoto Masataka Sato Kenichi Okazaki Kohei Yokoyama Shingo Eguchi Kunihiko Suzuki Yoshiharu Hirakata Shunpei Yamazaki |
| Affiliation: | 1. +81‐282‐29‐2211+81‐282‐29‐2214;2. Advanced Film Device Inc., Tsuga‐machi, Tochigi, Japan;3. Semiconductor Energy Laboratory Co., Ltd., Atsugi‐shi, Kanagawa, Japan. |
| Abstract: | We established a fabrication process of flexible displays, adopting a transfer technology using an inorganic tungsten‐separation‐layer. Our separation process requires physical force and water. Tungsten oxide over tungsten in the separation layer plays a key role in separation: water injection into the tungsten oxide reduces the force necessary for separation. In this study, we describe the apparatus we built for the fabrication process of flexible displays. This apparatus fabricated an 8k (7680 × 4320 effective pixels) flexible organic light‐emitting diode display. |
| Keywords: | flexible OLED display tungsten separation layer manufacturing apparatus water injection |