Micro gear validation: improving the correlation between virtual and physical testing

Downsizing mechanical systems requires the consideration of technological environment and restrictions. Nominal dimensions can be miniaturized, but shape and material deviations cannot be scaled down in the same way. In design these effects have to be considered and thus analyzed and evaluated in the very early activities. Simulation and test methods have to be adapted to the special characteristics of microtechnology. The present paper provides a strategy to validate micromechanical systems by means of virtual and physical testing. A standard test approach in macroscopic gear metrology, the tangential composite inspection, is used as validation tool for both test approaches. The results are very promising and show a good correlation between both miniaturized tests procedures.