AZ31镁合金表面磁控溅射TiO2薄膜的表面特性的研究

利用射频磁控溅射工艺在AZ31镁合金表面溅射了TiO₂薄膜,并对薄膜的特性进行了研究。扫描电镜观察显示制备态的TiO₂薄膜结构致密,表面无缺陷。对薄膜经过200℃保温30分钟、常温冷却或者85℃保持一小时后放到常温保持15分钟,连续实施4次该操作的两种热处理工艺后,观察到薄膜表面致密结构没有发生变化,表面也没有缺陷生成。这表明了薄膜具有热稳定性。薄膜表面硬度特性研究表明薄膜表面的显微硬度为1.51 GPa。最后,研究了表面镀有TiO₂薄膜的AZ31镁合金在模拟人体体液环境下的腐蚀（降解）特性。结果表明,在7天腐蚀过程中,AZ31镁合金基底没有被腐蚀,因此TiO₂薄膜对AZ31镁合金基底具有很好的保护作用。

Surface Properties of TiO2 Films Deposited on AZ31 Magnesium Alloys by r.f. Magnetron Sputtering

TiO₂ films were deposited on AZ31 magnesium alloy substrates by r.f.magnetron sputtering technique.The surface properties of the films were investigated,including thermal stability,surface micro-hardness and corrosion in Hank’s simulated body fluid（SBF）. The scanning electronic microscope observations reveal the dense structure characteristics of the as-deposited TiO₂ films.Under 200°C heat treatment for 30 minutes or 4 times’ heat cycles at 85°C for one hour,no structural defects such as cracks were observed on the surface of the films,indicating the good thermal stability of the films.Nano-indentation experiment shows that the average micro-hardness of TiO₂ film reaches 1.51 GPa.Finally,the 7 days’ corrosion experiments in SBF initially reveal that TiO₂ films help to prevent the magnesium alloy from corroding in SBF in certain time.