| 一种新型结构光栅测微传感器 |
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| 引用本文： | 倪学,韩雪冰.一种新型结构光栅测微传感器[J].光学精密工程,1996,4(2):87-90. |
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| 作者姓名： | 倪学 韩雪冰 |
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| 作者单位： | 中国科学院长春光学精密机械研究所 |
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| 摘 要： | 介绍一种新型结构光栅测微传感器,测量范围0～20mm,采用双轴直线运动轴承导轨,结构新颖紧凑,测量精度为±1μm.
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| 关 键 词： | 计量光栅技术 测微传感器 直线运动轴承导轨 |
| 收稿时间： | 1995-10-14 |
A New Structure or Grating Micro-Measuring linear Encoder |
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| Ni Xue,Han Xuebing.A New Structure or Grating Micro-Measuring linear Encoder[J].Optics and Precision Engineering,1996,4(2):87-90. |
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| Authors: | Ni Xue Han Xuebing |
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| Affiliation: | Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Changchun 130022 |
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| Abstract: | A new structure of grating micro-measuring linear encoder is described in this paper. Itsmeasuring length is 0.0-20.0mm. By means of two linear mobile bearing orbits,the apparatus is fashionable as well as compact in structure the measuring accuracy is up to ± 1.0μm. |
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| Keywords: | Metrology grating technique Micro--measuring linear encoler Linear mobilebearing orbit |
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