| 用于SPM技术的多维纳米定位系统 |
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| 引用本文： | 郑静琳,李玉和,廖小华,李庆祥.用于SPM技术的多维纳米定位系统[J].新技术新工艺,2006(4):60-62. |
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| 作者姓名： | 郑静琳 李玉和 廖小华 李庆祥 |
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| 作者单位： | 清华大学精密仪器与机械学系,100084 |
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| 摘 要： | 扫描探针显微术是微观表面探测的关键技术,而多维定位系统是其重要组成部分.介绍了扫描探针显微技术中典型纳米级定位系统的结构、组成及其驱动技术,如压电驱动、静电驱动以及磁悬浮驱动等,分析了柔性支承微动机构的设计,并对本领域的研究热点和发展方向进行了总结和探讨.
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| 关 键 词： | 多维纳米定位系统 扫描探针显微术(SPM) 直接驱动 导向机构 |
Multi-axis Nano-positioners in Scanning Probe Microscopes |
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| Zheng JingLin;Li YuHe;Liao XiaoHua;Li QingXiang.Multi-axis Nano-positioners in Scanning Probe Microscopes[J].New Technology & New Process,2006(4):60-62. |
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| Authors: | Zheng JingLin;Li YuHe;Liao XiaoHua;Li QingXiang |
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| Abstract: | This paper reports on recent advancements of multi axis nano-positioners in scanning probe microscopes. The actuators and flexure design of typical nano-positioning systems, including piezo-driven, electric static, meglev and thermally driven positioners are discussed in detail. Research focus and recent progress in this area are also presented. |
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| Keywords: | muhi-axis nanorpositioning stage scanning probe microscopy direct drive guide mechanism |
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