基于溶胶-凝胶法的ITO透光导电膜制备

以In(NO3)3•4.5H2O为主要原料，用乙酰丙酮作溶剂，掺加SnCl4•5H2O(铟锡物质的量比为10:1)制得溶胶，以石英玻璃为基体用提拉法制得ITO膜，与已有制备方法相比，试样每次提拉后都经过500℃退火处理，循环5次。利用表面轮廓仪、原子力显微镜、X射线衍射仪、紫外-可见分光光度计和四探针测试仪对所制样品的厚度、形貌结构和光电性能进行了测试表征。实验结果表明，制备的ITO膜导电性能好，在可见光范围内透光率高，电阻率约为5.625×10-3Ω•cm，透光率可达到90%～95%。

Preparation of conductive and transparent ITO film by sol-gel technique

The ITO film was prepared using In( NO3)3•4.5H2O as the primary material and acetylacetone as the solvent, adding SnCl4•5H2O with the mol ratio In : Sn was 10:1, using quartz glasses as the substrates. Comparing with the existing techniques, the samples in this paper were annealed at 500℃ after each dip-coating, cycling for 5 times. The samples’ thickness, morphology structure and performance of conductive and transparent were tested by surface profile ceremony (SPC), atomic force spectrometry (AFM), X-ray diffraction (XRD), UV-Vis spectrophotometer and four-point-probe ceremony. The experimental results show that the ITO film prepared by this method have good conductivity and high transmittance in the range of visible light with a resistivity of 5.625×10-3Ω•cm and a transmittance of 90%-95%.